Determination of physical response in (Mo/ALN) saw devices
Manifestación
- Autores
- Identificador
- 865500
- Fecha de publicación
- 2013
- Forma obra
- Texto
- Lugar de producción
- Surface Review and Letters, Vol. 20, No. 2, 2013
- Idioma
- inglés
- Nota de edición
- Digitalización realizada por la Biblioteca Virtual del Banco de la República (Colombia)
- Materias
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- Ciencias naturales y matemáticas; Ciencias naturales y matemáticas / Física
- Notas
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- Colfuturo
- © Derechos reservados del autor
- Aluminum nitride; Color purity frequency response; Nitruro de aluminio; Ondas acústicas; Optical reflectance; Pulsed laser deposition; Surface acoustic wave
- This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3 N 4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition.
The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with a Mo/AlN/Si3N4 configuration were fabricated employing AlN buffer and Mo Channel.
- Enlace permanente
- https://www.cervantesvirtual.com/obra/determination-of-physical-response-in-moaln-saw-devices-865500
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